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News 兼具压力、震动、弯曲和温度监测能力的超敏感薄膜压力传感器

兼具压力、震动、弯曲和温度监测能力的超敏感薄膜压力传感器

日期: 2020-05-09
浏览次数: 25

兼具压力、震动、弯曲和温度监测能力的超敏感薄膜压力传感器

UltrasensitiveThin-Film Pressure Sensors with a Broad DynamicResponse Range and Excellent Versatility Toward Pressure,Vibration, Bending, and Temperature

KeTian, Guopeng Sui, Pei Yang, Hua Deng,* andQiang Fu*

 

在本研究中,将具有表面尖刺状结构的Ni金属颗粒填充进热塑性TPV弹性体中,随后进行表面微结构处理,我们成功制备了在宽范围内具有高敏感性的柔性压力传感器。同时,这种可规模化生产,低成本的制备方法得到的传感器还能表现出温度、震动和弯曲的监测能力。这种结合逾渗通路和接触路径变化原理得到的压力传感器能够在0-20 kPa 的压力范围内表现出超高敏感性(1×106 kPa-1),在更高的压力范围(20-500 kPa)也能表现出3.1×104 kPa-1的高敏感性。此外,实验结果表明其仍具有较快的信号响应(< 50 ms),低检测极限(1 Pa)和优异的循环稳定性(> 500 次),这使得我们的柔性电子皮肤能够监测人类脉搏信号和手指触摸。另外,这种特殊的传感器结构也让我们的传感器具有检测机械震动,弯曲和温度刺激的能力。在监测手机震动信号,关节弯曲和温度变化领域表现出良好的应用前景。最后,通过在大尺寸微结构处理的TPV/Ni薄膜两面打印铜电极,我们制备了压力/温度分布监测阵列,传感器展现出高分辨率和优异的温度/压力区分能力。总之,我们在没有复杂结构设计的情况下开发出了成本效益高的多功能压力传感器,这可能会在下一代可穿戴、多功能电子皮肤中有广阔的应用前景。

 兼具压力、震动、弯曲和温度监测能力的超敏感薄膜压力传感器

Figure 1. Detection of pressure and temperaturedistribution. (a) Schematic diagram ofa sensor array, where the TPV/Nicomposite film is printed with Cu electrode array and then sandwiched betweentwo PET films. (b) Photograph of a human palm on the top of the sensor array(left) and contour mapping of electrical resistance variationsdescribing pressure distribution (right),where the color contrastindicates the magnitude of the touching force evaluated by log(I/I0).(c) Digital photograph of the flexible sensor array for precisely measuringpressure/temperature distribution excited by the metal letters. (d) Photos showing three metal letters “S” (6.8 g), “C”(6.4 g) and “U” (6.9 g) placed on the sensor arrays (bottom) and relativecurrent changes for each pixel in the arrays which draw the contour of thecorresponding letters with high resolution (upper). (e) Temperature sensingbehavior of TPV/Ni film with 36 vol% loading and (f) temperature distribution of the sensor array with the letters inaccordance with Figure 8d (bottom), which were placed on a thermoelectricplate with a settemperature of 50 °C, contouring the profile ofletters with high resolution by calculating resistance variation (log(R/R0)).

 

全文链接:https://pubs.acs.org/doi/abs/10.1021/acsami.0c05618

ACS Appl. Mater.Interfaces


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